 |
Products
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
 |
200mm SMIF Pod Opener with Integrated Cassette Transfer Robots |
Home＞Products＞
200mm Wafer SMIF Product Portfolio
|
|
|
| |
 |
PLUS-500CX-X |
|
- Designed for tools that fail to meet SEMI E-15 standards
- With 1507mm height,PLUS-500-CX-Xmodels can connect to process tool without blocking operation panel or monitor screen right above the loadports
- With extra 80mm lateral moving to left or right by slider, PLUS-500-CX-X are specially for narrow cassette pitch.
- due to above 2 features, PLUS-500-CX-X are specially for tools with a narrow cassette pitch and limited height space, like as TEL Alpha-8
- the minimun width of tool windowing opening down to 310mm
- The mininum pitch of 2 stages down to 240mm (for 2 stages)
- The arm reach 390mm
- PLUS-500-CX-X type information
- CX: Slide option - View from operator side, first letter C mean compact design. secondary letter X mean movind direction of slider. Its meaning is
- R: Right Hand(Slider move to left)
- L: Left Hand(Slider move to right)
- X: Utility Side - View from operator side
- R: Right hand side
- L: Left Hand Sie
|
|
|
|
|
|
